Angstrom Engineering Amod Electron Beam/Thermal Evaporator

Angstrom Engineering Amod Electron Beam / Thermal Evaporator

The Angstrom Engineering Amod, with its 500 mm x 500 mm baseplate, is currently configured with a four-pocket electron beam evaporation hearth and 2 tungsten boat thermal sources. Ultra-high vacuum (UHV) is achieved via cryopumping and samples are loaded/unloaded within a controlled glovebox environment (not shown). 

Specifications

  • Radiant substrate heater up to 400°C
  • Substrates up to 150 mm
  • Contact masks
  • Automated rate-controlled deposition with recipe support
  • Graphical HMI

Contact Information

Kyungnam Kang
[email protected]

Kai Xiao
Distinguished Staff Scientist
[email protected]

Christopher M Rouleau
Senior R&D Staff
865.574.5499
[email protected]