Keyence 3D Surface Profiler

A computer set up next to a microscope, with an image showing the field to the right

Fast, true color, high resolution 3D surface profiling of polymer film, composites, nanofabricated lithographed features, 2D devices.

Specifications/Capabilities/Extras

  • Keyence VK9510 violet laser 
  • Objectives: 10x, 20x, 50x, 150x 
  • 10 nm resolution
  • Statistics on dimensions of surface features
  • Scan areas up to 50 x 50 mm
  • Accurately measure steep slopes and angled surfaces

Contact Information

Ilia N Ivanov
Research and development scientist
[email protected]