Characterizing the Two and Three DimensionalResolution of an Improved Aberration-corrected STEM

Abstract

The successful development of third-order aberration correctors in transmission electron microscopy has seen aberration-corrected electron microscopes evolve from a specialist project, custom built at a small number of sites to a common instrument in many modern laboratories. Here we describe some initial results illustrating the two- and three- dimensional performance of an aberration corrected STEM with a prototype improved aberration corrector designed to also minimize fifth-order aberrations and a new, higher brightness gun. We demonstrate a resolution of 0.63 � and detection of single dopant atoms with three-dimensional sensitivity.