August 2009

Journal

Depth-resolved residual strain in MoN/Mo nanocrystalline films

By:
Chen, Gang; Singh, Dileep; Eryilmaz, Osman; Routbort, Jules; Larson, Bennett C; Liu, W.
Journal Name:
Applied Physics Letters
Page Number:
172104-172104
Volume:
89
Issue Number:
17
Publication Date:
August 24, 2009