December 2018

Journal

Direct atomic fabrication and dopant positioning in Si using electron beams with active real-time image-based feedback

By:
Jesse, Stephen ; Hudak, Bethany M; Zarkadoula, Evangelia ; Fuentes-Cabrera, Miguel A; Ganesh, Panchapakesan ; Kravchenko, Ivan I; Lupini, Andrew R; Maksov, Artem; Kalinin, Sergei V; Borisevich, Albina Y; Song, Jiaming
Journal Name:
Beilstein Journal of Nanotechnology
Page Number:
255303
Volume:
29
Issue Number:
25
Publication Date:
December 6, 2018
View DOI Listing:
https://doi.org/10.1088/1361-6528/aabb79