Evaluation of porous silicon oxide on silicon microcantilevers for sensitive detection of gaseous HF

Abstract

Sensitive detection of harmful chemicals in industrial applications is pertinent to safety. In this work, we demonstrate the use of a sensitive silicon micro-cantilever (MC) system with a porous silicon oxide layer deposited on the active side of the MCs that have been mechanically manipulated to increase sensitivity. Included is the evaluation of porous silicon oxide present on different geometries of MCs and exposed to varying concentrations of hydrogen fluoride in humid air. Profilometry, in addition to the signal generated by the stress-induced PSO coating and bending of the MC, were used as methods of evaluation.