Hybrid System Combining SIMS and Scanning Probe Microscopy

Abstract

Secondary ion mass spectrometry (SIMS) is a powerful technique for characterizing a diverse range of materials and systems. It provides localized chemical analysis with exceptional spectral resolution and sub-micrometer spatial resolution, making it invaluable for studying both surface and bulk materials. However, interpreting and reconstructing the extracted chemical data can be challenging due to sample inhomogeneity and complex surface morphology. To address these challenges, integrating SIMS with a concurrent measurement technique, such as scanning probe microscopy (SPM), is essential. This chapter explores pathways for combining SIMS with SPM to achieve a comprehensive analysis of various samples. Such a combination significantly enhances the capabilities of chemical studies by SIMS, enabling a range of advanced techniques from basic depth calibration and morphology correction to in-depth studies of the correlation between chemical and physical phenomena at the nanoscale.