November 2005

Journal

Thermal oxidation of polycrystalline and single crystalline aluminum nitride wafers (Prop 2003-054)

By:
Speakman, Scott A; Gu, Z; Edgar, J; Blom, Douglas ; Perrin, J; Chaudhuri, J
Journal Name:
Journal of Electronic Materials
Page Number:
1271-1279
Volume:
34
Issue Number:
10
Publication Date:
November 30, 2005