August 2005

Journal

Three-Dimensional Imaging of Individual Hafnium Atoms Inside a Semiconductor Device

By:
Van Benthem, Klaus ; Lupini, Andrew R; Kim, Miyoung; Baik, Hion; Doh, SeokJoo; Lee, Jong-Hoo; Oxley, Mark P; Findlay, Scott; Luck, Julia T; Pennycook, Stephen J
Journal Name:
Applied Physics Letters
Page Number:
34104
Volume:
87
Issue Number:
3
Publication Date:
August 15, 2005

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