March 2026

Conference Paper

Understanding the Quadrupole Mass Filter and Testing a High-Resolution QMS RGA for ITER

By:
Marcus, Chris ; Mellor, Robert
Page Number:
1-7
Book Title:
Society of Vacuum Coaters 68th Annual Technical Conference Proceedings
Publication Date:
March 12, 2026
Publisher Location:
Society of Vacuum Coaters, New Mexico, United States of America
Conference Name:
TechCon 2025: 68th Annual SVC Technical Conference
Conference Location:
Nashville, Tennessee, United States of America
Conference Sponsor:
Society of Vacuum Coaters
View DOI Listing:
https://doi.org/10.14332/svc25.proc.0021

Abstract

A common type of residual gas analyzer is the quadrupole mass spectrometer. One of the main components within this instrument is a mass filter known as the quadrupole. It is responsible for the selective throughput of the ionized gas particles - by ascending mass number - prior to ion impacts on the analyzer (or detector) surface from which the ion current signal is generated for processing. However, the quadrupole is not fully described in relation to the electric field characteristics and the function as an ion mass separator. This paper describes the basic origins of the electrical design, the intricate assembly criteria, and performance of the quadrupole within the spectrometer. A specialized quadrupole mass spectrometer is part of a configuration for a diagnostic gas analyzer system planned for ITER, a fusion research machine. It has a verified capability, essential as a diagnostic criterion for this reactor project, to successfully deconvolute the mass signals of Helium-4 and deuterium (reactor fuel exhaust gases, separated by only 0.026 atomic mass units), down to a relative three-percent concentration of the former gas. The associated preliminary testing, performed at the Oak Ridge National Laboratory, is also addressed. Finally, one of the key parameters used to express gas concentration, the relative sensitivity factor, will be explained, including an evaluation of dependency on other variables.


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