Peruse each section below, listed by CNMS research groups, for a quick list of capabilities offered at CNMS. Visit the group pages for more detailed information.

electron Materials MicroAnalysis Group Capabilities

Aberration Corrected STEM

FEI Titan AC-STEM

Aberration-corrected scanning transmission electron microscope with an ‘extreme Schottky’ high-brightness field emission gun (X-FEG) and variable operating voltages (60 and 300 kV). Equipped with Gatan Quantum GIF for dual-EELS and fast spectrum imaging , One View Camera and STEMx for 4D-STEM experiments, and specialty holders (Cryo, Tomography, Liquid, Gas, Thermal, Electrical Bias)

JEOL NeoARM

Aberration-corrected S/TEM-EELS microscope equipped with a cold-field emission gun, JEOL ASCOR aberration corrector, operating at 30kV, 60kV, 80kV, and 200kV with Gatan Quantum GIF for EELS/EFTEM, dual large solid angle EDS, secondary electron, segmented and pixelated STEM detectors. Specialty holders available for Cryo STEM, tomography, heating and electrical bias experiments.

Nion UltraSTEM

Ultra high-vacuum, low voltage (60-100kV), aberration-corrected STEM/EELS equipped with a cold-field emission gun, Nion IRIS spectrometer, and Dectris ELA hybrid-pixel detector. Specialty holders available for heating and electrical biasing experiments.

Nion Hermes

Monochromated aberration-corrected STEM (“MACSTEM”) with a side-entry stage, provides high-vacuum, low voltage (60-100kV), aberration-corrected STEM and monochromated EELS to below 10 meV energy resolution. It is equipped with a cold-field emission gun, Nion IRIS spectrometer, and Dectris ELA hybrid-pixel detector. Specialty holders available for heating, cooling to liquid nitrogen temperatures, and electrical biasing experiments.

Cryo Electron Microscopy

Thermo Fisher Scientific Krios G4 Cryo-TEM

Dedicated 300kV Cryo-S/TEM, equipped with a high brightness “extreme Schottky” field emission gun (X-FEG), is ideally suited for cryo-electron tomography, single particle analysis, and micro-electron diffraction applications. 

Thermo Fisher Scientific Talos L120C TEM

Dedicated 120kV Cryo-TEM, equipped with a LaB6 source, Ceta CMOS Camera, and Gatan multi-specimen, single tilt cryo-transfer holder for cryo-TEM imaging and analysis.

Thermo Fisher Scientific Helios Hydra 5 Cryo PFIB

DualBeam cryogenic plasma FIB instrument equipped with four plasma bean ion sources (Xe, Ar, O, and N), cryogenic system for sample preparation and transfer, and SE/BSE/ICE/EDS/EBSD detectors.

Atom Probe Tomography

Cameca LEAP 4000X HR

A local electrode atom probe (LEAP) with a UV, 250 kHz laser, a 200 kHz high-voltage pulse generator, reflectron energy compensating lens, and a single atom cross delay line position-sensitive detector.

Thermo Fisher Helios 5 CX DualBeam FIB

Dedicated dual beam focused ion beam instrument used for APT preparation of site-specific, needle shaped specimens and equipped with SE, TLD, DBS and EDS detectors. 

FEI Nova 200 Dual Beam FIB

Focused ion beam instrument dedicated to the fabrication of site-specific, needle shaped specimens required for APT.

TEM Specimen Preparation

Fischione Instruments Model 1040 NanoMill

This instrument is an ultra-low energy argon ion beam milling system for thinning TEM samples. 

Fischione Instruments Model 1010 Ion Mill 

This instrument uses an argon ion beam to perform final ion-beam milling of the specimen to electron transparency. 

Gatan Ilion Model 693 Precision Cross-Section Mills

The Gatan Model 693 Ilion Precision Cross-Section Milling System is a broad beam argon ion milling system for the preparation of ultra-smooth surfaces for SEM and EBSD. 

Gatan PIPs II Ion Mill

This instrument uses an argon ion beam to perform final ion-beam milling of the specimen to electrontransparency. 

Thermo Fisher Vitrobot Mark IV

This semi-automated vitrification system allows for fast, easy, and reproducible cryoEM sample preparation. 

Leica EM ICE High Pressure Freezer

Allows for cryo-immobilization of solvated samples under high pressure, with controlled freezing to prevent crystalline ice formation. 

Leica EM UC7 Cryogenic Ultramicrotome

Allows for ultra-thin sectioning of resin-embedded, room temperature samples or cryo-immobilized samples. 

Functional AFM Group Capabilities

ADVANCED AFM CAPABILITIES FOR FUNCTIONAL STUDIES

Nano- and Electromechanics

Nanomechanical Measurements

Study of nanoscale elastic and plastic properties by stiffness, adhesion and friction force measurements 

Nano Electromechanical Measurements

Piezoresponse Force Microscopy to detect mechanical deformation of materials under bias modulated AFM tips, to study piezoelectricity and ionic motion  

Electric and Dielectric Responses

Conductive AFM

Study of local conductive properties and I(V) spectrosctopy by using the AFM tip as a top mobile electrode

Electrostatic and Kelvin Probe Force Microscopy

Measurement of local surface work functions and tip sample electrostatic interactions to study surface charge states

Scanning Microwave Impedance Microscopy

Study of electrical capacitance, dielectric properties and dielectric losses by reflected microwave radiation using the AFM tip as a MW antenna 

Environmental Control and Solid-Liquid Interfaces

Nanoscale Thermal Microscopy

Laser assisted sample heating through AFM tip, to study thermal dependence of functional properties

FluidFM

Fully automated large scanning AFM (DriveAFM, Nanosurf) equipped with hollow microfluidic probes

Glove Box AFM

Control of environmental conditions with AFM in Ar filled glove box

Environmental Controlled AFM

Control of environmental conditions in AFM using an environmental cell for gases and liquids 

Advanced Spectroscopies & Workflows

Adaptive Band Excitation and Software for SPM

Hardware and software toolbox for multifrequency SPM modes

G-Mode Controller and Software for SPM

Hardware and software toolbox for full signal data acquisition and processing

Scanning Oscillator and Software for SPM

Multifrequency toolbox for synchronous modulation of external fields in SPMs

PyScanner Controller and Software for SPM

Hardware and software toolbox for customized control of SPM operation parameters (scanners and tip motion)

SCANNING PROBES AND PHOTONICS LAB

Nanoscale Combined Optical and SPM Measurements

AFM – IR Microscopy

Anasys NanoIR AFM (Bruker) with 4 chip QLC laser for IR absorption spectroscopy in contact resonance mode 

AFM – Raman Microscopy

Integra Spectra II AFM (NT-MDT) combining general purpose AFM with Raman confocal spectrometry

Scanning Near Field Optical Microscopy

AFM Tip induced near field spectroscopy for sub-wavelength resolution

UHV SCANNING PROBE MICROSCOPIES

UHV Scanning Force Microscopy

Variable temperature UHV AFM with optical beam deflection detection for contact and non-contact measurements  

QUANTUM ELECTRONIC AND MAGNETIC PROBES

Magnetic Force Microscopy

Study of magnetic nanostructures and nanoscale ferromagnetism

ToF SIMS 

ToF SIMS

ToF.SIMS.5-NSC combining FIB, AFM and time-of-flight secondary ion mass spectrometer (ToF-SIMS) in the same vacuum chamber for correlative functional and chemical characterization

Scanning Tunneling Microscopy Group Capabilities

See group page for full list, including ultra-high vacuum, variable temperature, and low temperature cabailities

Functional Hybrid Nanomaterials Group Capabilities

Synthesis

Pulsed Laser Deposition of Thin Films

Several PLD systems for thin film growth

Pulsed Laser Deposition with in situ Diagnostics

PLD systems with in situ plume and film diagnostics

Autonomous PLD Synthesis Development Platform

Automated PLD with XPS, Raman, and AI/ML Exploration

CVD Synthesis of 2D Materials

Multiple CVD systems for 2D materials growth

Optical Characterization

Cathodoluminescence SEM

CL with nm resolution, single photon detection

Tunable Low Frequency Raman Spectroscopy

Tunable CW laser and Raman spectroscopy

Cryo-Optical Spectroscopies

Raman and PL at cryogenic temperatures

Ultra-fast (fs) Pump-Probe Spectroscopy

Femtosecond laser and UV-Vis microspectroscopy

Renishaw Confocal Raman Microscopy and Fluorescence Mapping Systems

Raman and PL mapping in specialized environments

Cary 5000 UV-Vis-NIR Spectrophotometer

Spectrophotometer for absorption spectra with multiple specialized attachments

Fluorometer and Luminescence Spectroscopy System

Fluorescence and PLE spectra of liquids, UV-Vis to NIR

Keyence 3D Surface Profiler

Optical height profiling with 10 nm resolution

Processing

Controlled Atmosphere Glovebox Facility Overview

Multi-glovebox for 2D material exfoliation, transfer, electrode deposition, and testing

Fully Motorized 2D Transfer System

HQGraphene system for automated stamping of 2D materials

Automated Wire Bonder

“Hands off” bonding of samples in glovebox

Confocal Raman Imaging Microscope in Glovebox

WiTec Apyron automated Raman imaging of 2D material heterostructures

Maskless Laser Writer

Raith Picomaster 100 in glovebox for writing electrode patterns

Angstrom Engineering Amod Electron Beam/Thermal Evaporator

For precise thin film deposition of electrodes and coatings

Sonospray Deposition of Nanomaterials and Organics

Sonicated tip spray deposition of nanomaterial solutions

Properties Measurements

Physical Property Measurement System (PPMS)

Electrical transport, magnetometry, DC resisitivity measurements to cryogenic temperatures

Multifunctional Environmental Chamber

In situ measurement of electrical, optical, and gravimetric/viscoelastic properties of thin films in changing temperature, gas pressure and type, humidity

Electrochemical (AC and DC) and Optical Characterization Measurement System

Impedance measurement systems by Biolin and Zahner with optical excitation for multiple applications

Q-Sense Pro Gravimetric/Viscoelastic Thin Film Properties Measurement System

QCM-D sensing of gravimetric and viscoelastic changes in thin films measures adsorption/desorption, binding, cross-linking, and other surface interactions

External Quantum Efficiency Measurement System for Light Emitting Devices

Calibrated LED efficiency measurement system

External Quantum Efficiency of Photovoltaic Devices

Calibrated PV efficiency testing system by Hamamatsu

X-ray Characterization

Xenocs Xeuss 2.0 & 3.0 Small- and Wide-Angle X-ray Scattering (SAXS/WAXS) System

Structural characterization of nanomaterials, such as polymers, nanocomposites, patterned structures, thin films, gels and biological samples

Malvern PANalytical Aeris Benchtop X-ray Diffraction (XRD) System

Used for determining the chemical and phase structure of materials 

Malvern PANalytical X’Pert Pro MPD High Resolution X-ray Diffraction System

Utilized for the identification of crystalline phase structure and quantitative phase analysis

Thin Film XRD

Multipurpose X-ray diffractometer for X-ray reflectivity, reciprocal space mapping, rocking curve analysis, theta-2theta scans, and texture analysis

Functional Hybrid Characterization

Photocatalysis, Electrocatalysis and Plasma Catalysis

Specialized systems for photo-, plasma-, and electro-induced catalysis

MacroMolecular Nanomaterials Group Capabilities

Macromolecular Synthesis

For an overview, including anionic polymerization, step-growth polymerization, surface-initiated polymerization, and novel polymers and precursors visit here.

Auto Flow Reactors

Deuterated Monomers, Polymers, Ionic Liquids, and Specialty Molecules

For an overview, including Synthesis of Deuterated Monomers and Building Blocks, Selective Deuteration of Polymers, and Biodeuteration, visit here.

Macromolecular Characterization—Molecular Weight, Spectroscopy, Scattering, Thermal Analysis, Broadband Dielectric Spectroscopy

Bruker NEO Console 500 MHz NMR

Size Exclusion Chromatography (SEC)

Dynamic Light Scattering

Broadband Dielectric Spectroscopy

Varian Cary 5000 UV-Visable NIR

Bruker Vertex70 FTIR Spectrometer

Two-Dimensional Infrared Spectroscopy (2DIR)

Thermal Characterization: TA Discovery Hybrid Rheometer, TA TGA Q5000 IR, TA 800 DMA and TA DSC Q2000

Bruker MALDI-TOF AutoFlex

Thin Film Characterization

JA Woollam M-2000U Spectroscopic Ellipsometer

Bruker Lumos FTIR Microscope

Kruss DSA 30 Contact Angle Goiniometer

SNE-4500M Tabletop SEM

Optical Microscope 

Sum-Frequency Generation Vibrational Spectroscopy

3D Printing and Additive Manufacturing

Stereolithography

Fused Deposition Modeling

Selective Laser Sintering

Viscous Solution Printers

Nanofabrication Research Laboratory Group Capabilities

Thin Film Deposition & Reactive Ion Etching

Atomic Layer Deposition

A Lesker ALD150LX and Oxford FlexAl system are available to deposit ultra-thin conformal films of oxides and nitrides.

First Nano Rapid Thermal Processor 

Controlled heating of samples for annealing and material modification.

Tystar Furnace CVD

High temperature deposition of high quality dielectric films

Oxford Plasmalab System 100 PECVD

Plasma enhanced deposition of silicon based films.

Oxford Plasmalab System 100 Reactive Ion Etchers

Chlorine, fluorine, & cryogenic dry etching of thin films and silicon substrates.

DiamoTek 700-6 Microwave Plasma Diamond CVD Film Deposition Diamond Film Deposition

Deposition of nano-crystalline diamond thin films.

Physical Vapor Deposition

DC Magnetron sputtering and electron beam evaporation are available for physical vapor deposition of metals, as well as some dielectric and semiconducting materials.

Electron Beam and Optical Lithography

______

JEOL 8100 FS Electron Beam Lithography

Create nanoscale patterns in electron beam resist across large areas at high speeds

SUSS MicroTech Contact Aligner

Align and expose photoresist patterns using masks created here or at home

Heidelberg DWL 66

Design and create your own masks onsite in hours

Heidelberg MLA150 Maskless Aligner 

Rapid mask and direct substrate writing

3D Direct-write ion, electron and optical processing
 

____

Nanoscribe Photonics Professional GT System

Multiphoton lithography to create unique 3D polymer architectures

Raith Velion Multiple Ion Species Ion Beam Lithography System

Multi-ion direct write processing at the wafer-scale

Thermo Scientific Helios 5 Hydra UX DualBeam Multiple Ion Plasma FIB / SEM

Precise focused ion beam (FIB) milling and etching combined with metal/insulator deposition for nanoscale prototyping, machining, 2D and 3D-characterization, and analysis

Zeiss Orion NanoFab Helium Ion Microscope  

Helium and neon offer extensive possibility for imaging and exploring creation of functional defects in materials

Design, Characterization & Packaging

____

Asylum MFP-3D Atomic Force Microscope

AFM measurement of surface properties and topography

Zeiss Merlin SEM

Merlin FE-SEM can achieve an image resolution of 1 nanometer and is coupled with a Bruker energy dispersive X-ray spectroscopy (EDS) system

Phenom XL Scanning Electron Microscope

Benchtop imaging with nanoscale resolution

Wyko NT9800 Optical Profilometer

Optical measurement of surface topography and vibrational characteristics

Design and Modeling Software

Work with staff members to layout your project and create physical models before you arrive and throughout your collaboration.

Accretech SS10 dicing saw

Wafers to chips with precision

SCS PDS2010 Lab Coater 2 Parylene Coating System

Deposit parylene for encapsulation and dry lift-off

Optical Thin Film Characterization

Interferometric and ellipsometric measurements of thin films

Bio-affiliate Labs & Optical Microscopy

Ultra high resolution and Confocal Fluorescence Microscopy, Time-lapse brightfield and epifluorscence microscopy and facilities for cell culture and sample preparation are available.

Probe Stations

Understand the performance of your devices in controlled environments

Nanomaterials Theory Institute Group Capabilities

See group page for full list.

Data NanoAnalytics Group Capabilities

See group page for full list.